Farrokh Ayazi: search on Z-Library

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1

An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations

Zhili Hao, Ahmet Erbil, Farrokh Ayazi

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 196 KB

english, 2003

2

A Digital Phase Demodulation Technique for Resonant MEMS Gyroscopes

Norouzpour-Shirazi, Arashk, Zaman, Mohammad Faisal, Ayazi, Farrokh

Journal:

IEEE Sensors Journal

Year:

2014

Language:

english

File:

PDF, 2.00 MB

english, 2014

3

An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon

Reza Abdolvand, Farrokh Ayazi

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 1.42 MB

english, 2008

4

Micro-gravity capacitive silicon-on-insulator accelerometers

Amini, Babak Vakili, Ayazi, Farrokh

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 1.26 MB

english, 2005

5

Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators

Zhili Hao, Farrokh Ayazi

Journal:

Sensors and Actuators A: Physical

Year:

2007

Language:

english

File:

PDF, 1.15 MB

english, 2007

6

[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - High-aspect-ratio sub-micron trench etching on SOI using wet metal-assisted chemical etching (MaCE) process

Hamelin, Benoit, Li, Liyi, Daruwalla, Anosh, Wong, Ching-Ping, Ayazi, Farrokh

Year:

2016

File:

PDF, 862 KB

2016

7

A 3D-HARPSS Polysilicon Microhemispherical Shell Resonating Gyroscope: Design, Fabrication, and Characterization

Shao, Peng, Tavassoli, Vahid, Mayberry, Curtis L., Ayazi, Farrokh

Journal:

IEEE Sensors Journal

Year:

2015

Language:

english

File:

PDF, 1.62 MB

english, 2015

8

[IEEE 2011 IEEE International Symposium on Circuits and Systems (ISCAS) - Rio de Janeiro, Brazil (2011.05.15-2011.05.18)] 2011 IEEE International Symposium of Circuits and Systems (ISCAS) - A phase-noise model for nonlinear piezoelectrically-actuated MEMS oscillators

Pardo, Mauricio, Sorenson, Logan, Ayazi, Farrokh

Year:

2011

Language:

english

File:

PDF, 988 KB

english, 2011

9

A Dual-Mode Actuation and Sensing Scheme for In-Run Calibration of Bias and Scale Factor Errors in Axisymmetric Resonant Gyroscopes

Norouzpour-Shirazi, Arashk, Ayazi, Farrokh

Journal:

IEEE Sensors Journal

Year:

2018

Language:

english

File:

PDF, 1.96 MB

english, 2018

10

Bulk and Surface Thermoelastic Dissipation in Micro-Hemispherical Shell Resonators

Sorenson, Logan, Shao, Peng, Ayazi, Farrokh

Journal:

Journal of Microelectromechanical Systems

Year:

2015

Language:

english

File:

PDF, 5.77 MB

english, 2015

11

High aspect-ratio polysilicon micromachining technology

Farrokh Ayazi, Khalil Najafi

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 2.28 MB

english, 2000

12

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Electrical characterization of ALD-coated silicon dioxide micro-hemispherical shell resonators

Shao, Peng, Tavassoli, Vahid, Liu, Chang-Shun, Sorenson, Logan, Ayazi, Farrokh

Year:

2014

Language:

english

File:

PDF, 1.05 MB

english, 2014

13

SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Orlando, Florida (Monday 25 April 2011)] Micro- and Nanotechnology Sensors, Systems, and Applications III - Energy dissipation in micromechanical resonators

Ayazi, Farrokh, Sorenson, Logan, Tabrizian, Roozbeh, George, Thomas, Islam, M. Saif, Dutta, Achyut K.

Year:

2011

Language:

english

File:

PDF, 5.33 MB

english, 2011

14

Dynamic tuning of MEMS resonators via electromechanical feedback

Norouzpour-Shirazi, Arashk, Hodjat-Shamami, Mojtaba, Tabrizian, Roozbeh, Ayazi, Farrokh

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2015

Language:

english

File:

PDF, 5.27 MB

english, 2015

15

Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators

Yang, Jeremy, Hamelin, Benoit, Ayazi, Farrokh

Journal:

Journal of Microelectromechanical Systems

Year:

2020

File:

PDF, 3.18 MB

2020

16

[IEEE 2011 IEEE International Symposium on Circuits and Systems (ISCAS) - Rio de Janeiro, Brazil (2011.05.15-2011.05.18)] 2011 IEEE International Symposium of Circuits and Systems (ISCAS) - A band-reject nested-PLL phase-noise reduction scheme for clock-cleaners

Pardo, Mauricio, Ayazi, Farrokh

Year:

2011

Language:

english

File:

PDF, 504 KB

english, 2011

17

[IEEE 2012 IEEE International Symposium on Circuits and Systems - ISCAS 2012 - Seoul, Korea (South) (2012.05.20-2012.05.23)] 2012 IEEE International Symposium on Circuits and Systems - Process compensated CMOS temperature sensor for microprocessor application

Jeong, Yaesuk, Ayazi, Farrokh

Year:

2012

Language:

english

File:

PDF, 1.37 MB

english, 2012

18

Performance Analysis of Gyroscope and Accelerometer Sensors for Seismocardiography-Based Wearable Pre-Ejection Period Estimation

Shandhi, Md Mobashir Hasan, Semiz, Beren, Hersek, Sinan, Goller, Nazli, Ayazi, Farrokh, Inan, Omer

Journal:

IEEE Journal of Biomedical and Health Informatics

Year:

2019

Language:

english

File:

PDF, 5 KB

english, 2019

19

[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - A 27 MHz temperature compensated MEMS oscillator with sub-ppm instability

Tabrizian, Roozbeh, Pardo, Mauricio, Ayazi, Farrokh

Year:

2012

Language:

english

File:

PDF, 2.02 MB

english, 2012

20

[IEEE 2009 IEEE Custom Integrated Circuits Conference (CICC) - San Jose, CA, USA (2009.09.13-2009.09.16)] 2009 IEEE Custom Integrated Circuits Conference - MEMS for integrated timing and spectral processing

Year:

2009

Language:

english

File:

PDF, 5.41 MB

english, 2009

21

Wafer-Level Packaging of Micromechanical Resonators

Joseph, Paul Jayachandran, Monajemi, Pejman, Ayazi, Farrokh, Kohl, Paul A.

Journal:

IEEE Transactions on Advanced Packaging

Year:

2007

Language:

english

File:

PDF, 3.18 MB

english, 2007

22

Three-dimensional, ultra-wideband micromachined millimetre-wave hemispherical shell antenna: theoretical concept and calibration

Mirbeik, Amir, Ayazi, Farrokh, Tavassolian, Negar, Tavassoli, Vahid

Journal:

IET Microwaves Antennas & Propagation

Year:

2016

Language:

english

File:

PDF, 1009 KB

english, 2016

23

Electrically coupled MEMS bandpass filters: Part I: With coupling element

Siavash Pourkamali, Farrokh Ayazi

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 665 KB

english, 2005

24

[IEEE 2006 IEEE International Solid-State Circuits Conference. Digest of Technical Papers - San Francisco, CA (2006.02.6-2006.02.9)] 2006 IEEE International Solid State Circuits Conference - Digest of Technical Papers - A 4.5mW Closed-Loop /spl Delta//spl Sigma/ Micro-Gravity CMOS-SOI Accelerometer

Babak Vakili Amini,, Reza Abdolvand,, Farrokh Ayazi,

Year:

2006

Language:

english

File:

PDF, 904 KB

english, 2006

25

[IEEE 2007 IEEE Sensors - Atlanta, GA, USA (2007.10.28-2007.10.31)] 2007 IEEE Sensors - Wafer-Level Encapsulation and Sealing of Electrostatic HARPSS Transducers

Pourkamali, Siavash, Ayazi, Farrokh

Year:

2007

Language:

english

File:

PDF, 1.88 MB

english, 2007

26

A ±0.3ppm Oven-Controlled MEMS Oscillator using Structural Resistance Based Temperature Sensing

Liu, Chang-Shun, Tabrizian, Roozbeh, Ayazi, Farrokh

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2018

Language:

english

File:

PDF, 2.20 MB

english, 2018

27

Precision wearable accelerometer contact microphones for longitudinal monitoring of mechano-acoustic cardiopulmonary signals

Gupta, Pranav, Moghimi, Mohammad J., Jeong, Yaesuk, Gupta, Divya, Inan, Omer T., Ayazi, Farrokh

Journal:

npj Digital Medicine

Year:

2020

Language:

english

File:

PDF, 1.90 MB

english, 2020

28

Electrically coupled MEMS bandpass filters: Part II. Without coupling element

Siavash Pourkamali, Farrokh Ayazi

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 539 KB

english, 2005

29

[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - A high-performance single-chip timing and inertial measurement unit with robust mode-matched gyroscopes

Wen, Haoran, Daruwalla, Anosh, Jeong, Yaesuk, Gupta, Pranav, Choi, Jaehoo, Liu, Chang-shun, Ayazi, Farrokh

Year:

2018

File:

PDF, 4.61 MB

2018

30

[IEEE 2018 IEEE/ION Position, Location and Navigation Symposium (PLANS) - Monterey, CA, USA (2018.4.23-2018.4.26)] 2018 IEEE/ION Position, Location and Navigation Symposium (PLANS) - Wafer-level-packaged HARPSS+ MEMS platform: Integration of robust timing and inertial measurement units (TIMU) on a single chip

Wen, Haoran, Daruwalla, Anosh, Jeong, Yaesuk, Gupta, Pranav, Choi, Jaehoo, Liu, Chang-Shun, Ayazi, Farrokh

Year:

2018

Language:

english

File:

PDF, 2.04 MB

english, 2018

31

High- $Q$ AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing

Fu, Jenna L., Ayazi, Farrokh

Journal:

Journal of Microelectromechanical Systems

Year:

2015

Language:

english

File:

PDF, 2.02 MB

english, 2015

32

[IEEE 2019 IEEE Custom Integrated Circuits Conference (CICC) - Austin, TX, USA (2019.4.14-2019.4.17)] 2019 IEEE Custom Integrated Circuits Conference (CICC) - High-Q Timing and Inertial Measurement Unit Chip (TIMU) with 3D Wafer-Level Packaging

Ayazi, Farrokh, Wen, Haoran, Jeong, Yaesuk, Gupta, Pranav, Daruwalla, Anosh, Liu, Chang-Shun

Year:

2019

Language:

english

File:

PDF, 34 KB

english, 2019

33

A Band-Reject Nested-PLL Clock Cleaner Using a Tunable MEMS Oscillator

Pardo, Mauricio, Ayazi, Farrokh

Journal:

IEEE Transactions on Circuits and Systems I: Regular Papers

Year:

2014

Language:

english

File:

PDF, 2.13 MB

english, 2014

34

A Polysilicon Microhemispherical Resonating Gyroscope

Shao, Peng, Mayberry, Curtis L., Gao, Xin, Tavassoli, Vahid, Ayazi, Farrokh

Journal:

Journal of Microelectromechanical Systems

Year:

2014

Language:

english

File:

PDF, 906 KB

english, 2014

35

Localized Eutectic Trimming of Polysilicon Microhemispherical Resonating Gyroscopes

Hamelin, Benoit, Tavassoli, Vahid, Ayazi, Farrokh

Journal:

IEEE Sensors Journal

Year:

2014

Language:

english

File:

PDF, 2.10 MB

english, 2014

36

Micromechanical IBARs: Tunable High-$Q$ Resonators for Temperature-Compensated Reference Oscillators

Ho, Gavin K, Sundaresan, Krishnakumar, Pourkamali, Siavash, Ayazi, Farrokh

Journal:

Journal of Microelectromechanical Systems

Year:

2010

Language:

english

File:

PDF, 2.02 MB

english, 2010

37

Single-resonator dual-frequency AIN-on-Si MEMS oscillators

Lavasani, Hossein Miri, Abdolvand, Reza, Ayazi, Farrokh

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2015

Language:

english

File:

PDF, 8.60 MB

english, 2015

38

An FPGA-Based Interface System for High Frequency Bulk-Acoustic-Wave (BAW) Micro-Gyroscopes with In-Run Automatic Mode-Matching

Li, Chong, Wen, Haoran, Wisher, Samuel, Norouzpour-Shirazi, Arashk, Lei, Junyang, Chen, Hua, Ayazi, Farrokh

Journal:

IEEE Transactions on Instrumentation and Measurement

Year:

2019

Language:

english

File:

PDF, 2.10 MB

english, 2019

39

[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - A 0.1°/HR bias drift electronically matched tuning fork microgyroscope

Sharma, Ajit, Zaman, Mohammad Faisal, Zucher, Mark, Ayazi, Farrokh

Year:

2008

Language:

english

File:

PDF, 1.50 MB

english, 2008

40

High-Frequency AlN-on-Silicon Resonant Square Gyroscopes

Tabrizian, Roozbeh, Hodjat-Shamami, Mojtaba, Ayazi, Farrokh

Journal:

Journal of Microelectromechanical Systems

Year:

2013

Language:

english

File:

PDF, 571 KB

english, 2013

41

The HARPSS process for fabrication of precision MEMS inertial sensors

Journal:

Year:

2002

Language:

english

File:

PDF, 578 KB

english, 2002

42

Lamb Waves and Resonant Modes in Rectangular-Bar Silicon Resonators

Casinovi, Giorgio, Gao, Xin, Ayazi, Farrokh

Journal:

Journal of Microelectromechanical Systems

Year:

2010

Language:

english

File:

PDF, 965 KB

english, 2010

43

[IEEE 2008 IEEE International Symposium on Circuits and Systems - ISCAS 2008 - Seattle, WA, USA (2008.05.18-2008.05.21)] 2008 IEEE International Symposium on Circuits and Systems - CMOS ASIC for MHz silicon BAW gyroscope

Shah, Jalpa, Johari, Houri, Sharma, Ajit, Ayazi, Farrokh

Year:

2008

Language:

english

File:

PDF, 921 KB

english, 2008

44

[IEEE 2009 IEEE Custom Integrated Circuits Conference (CICC) - San Jose, CA, USA (2009.09.13-2009.09.16)] 2009 IEEE Custom Integrated Circuits Conference - SiGe digital frequency dividers with reduced residual phase noise

Horst, Stephen, Phillips, Stan, Lavasani, Hossein, Ayazi, Farrokh, Cressler, John D.

Year:

2009

Language:

english

File:

PDF, 788 KB

english, 2009

45

Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators

Gianluca Piazza, Reza Abdolvand, Gavin K. Ho, Farrokh Ayazi

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 612 KB

english, 2004

46

[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Multi-DOF inertial MEMS: From gaming to dead reckoning

Year:

2011

Language:

english

File:

PDF, 1.67 MB

english, 2011

47

Micromechanical IBARs: Modeling and Process Compensation

Ho, Gavin K, Perng, John Kangchun, Ayazi, Farrokh

Journal:

Journal of Microelectromechanical Systems

Year:

2010

Language:

english

File:

PDF, 1.56 MB

english, 2010

48

[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Capacitive LamÃ© Mode Resonators in $65\ \mu \mathrm{m}$-Thick Monocrystalline Silicon Carbide with Q-Factors Exceeding 20 Million

Yang, Jeremy, Hamelin, Benoit, Ayazi, Farrokh

Year:

2020

File:

PDF, 4.80 MB

2020

49

[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Epitaxially-grown thick polysilicon for baw disk resonator gyroscopes with very low dissipation

Daruwalla, Anosh, Wen, Haoran, Mirjalili, Ramin, Ayazi, Farrokh

Year:

2018

Language:

english

File:

PDF, 2.27 MB

english, 2018

50

[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - A Low-Voltage Temperature-Stable Micromechanical Piezoelectric Oscillator

Abdolvand, Reza, Mirilavasani, Hossein, Ayazi, Farrokh

Year:

2007

Language:

english

File:

PDF, 2.65 MB

english, 2007

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